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Water-Induced Phase Separation Forming Macrostructured Epitaxial Quartz Films on Silicon.
- Source :
-
Advanced Functional Materials . Sep2014, Vol. 24 Issue 35, p5494-5502. 9p. - Publication Year :
- 2014
-
Abstract
- Quartz has been widely used as a bulk material in optics, the microelectronic industry, and sensors. The nanostructuring and direct integration of oriented quartz crystals onto a semiconductor platform has proven to be challenging. However, here, a new approach is presented to integrate epitaxial quartz films with macroperforations within the range of 500 nm and 1 μm using chemical solution deposition. This method constitutes an appealing approach to develop piezoelectric mass sensors with enhanced resonance frequencies due to the thickness reduction. Perforated quartz films on (100)-silicon are prepared from amorphous silica films deposited via dip-coating and doped with metal cations that catalyze quartz crystallization. The metal cations are also active in the formation of the macroperforations, which arise due to a phase separation mechanism. Cationic surfactant-anion-metal cation assemblies stabilize droplets of water, creating an indentation in the hydrophilic silica matrix which remains after solvent evaporation. Many cations induce phase separation, including Li+, Na+, Sr2+, Mn2+, Fe2+/Fe3+, Ca2+, Ce3+ and La3+ but only the Sr2+ and Ca2+ cations in this series induce the epitaxial growth of α-quartz films under the conditions studied. The combination of sol-gel chemistry and epitaxial growth opens new opportunities for the integration of patterned quartz on silicon. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 1616301X
- Volume :
- 24
- Issue :
- 35
- Database :
- Academic Search Index
- Journal :
- Advanced Functional Materials
- Publication Type :
- Academic Journal
- Accession number :
- 98147772
- Full Text :
- https://doi.org/10.1002/adfm.201401066