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Strip heater for ohmic contacts to semiconductors.
- Source :
-
Review of Scientific Instruments . Dec1985, Vol. 56 Issue 12, p2323. 2p. - Publication Year :
- 1985
-
Abstract
- A fast sheet-molybdenum strip heater for alloying of ohmic contacts to semiconductor devices is described. Its temperature/time program is microprocessor controlled, so that heating and cooling rates of 3700 and 2800 °C/min, respectively, can be achieved reproducibly. [ABSTRACT FROM AUTHOR]
- Subjects :
- *SEMICONDUCTOR equipment
*HEATING equipment
*MOLYBDENUM
Subjects
Details
- Language :
- English
- ISSN :
- 00346748
- Volume :
- 56
- Issue :
- 12
- Database :
- Academic Search Index
- Journal :
- Review of Scientific Instruments
- Publication Type :
- Academic Journal
- Accession number :
- 9781911
- Full Text :
- https://doi.org/10.1063/1.1138374