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Ion energy distributions in SF6 plasmas at a radio-frequency powered electrode.
- Source :
-
Journal of Applied Physics . 7/1/1996, Vol. 80 Issue 1, p56. 10p. 3 Diagrams, 14 Graphs. - Publication Year :
- 1996
-
Abstract
- Measures the ion energy distributions (IEDs) of positive and negative ions of SF6 plasmas at the cathode of a reactive ion etcher (RIE) with an energy-resolving quadrupole mass spectrometer. Energy distribution of positive ions; IEDs of negative ions; Measurement of error due to the rf voltage on the cathode.
- Subjects :
- *PLASMA gases
*IONS
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 80
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 9712100744
- Full Text :
- https://doi.org/10.1063/1.362761