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Optical lithography: Introduction.
- Source :
-
IBM Journal of Research & Development . Jan-Mar97, Vol. 41 Issue 1/2, p3. 4p. - Publication Year :
- 1997
-
Abstract
- Focuses on the development, manufacturing and research perspectives of optical lithography. Lithographic system; Alternatives to optical lithography; Optical lithography requirements; Resolution limit of optical lithography; Self-assembling materials (SAMs).
- Subjects :
- *LITHOGRAPHY
Subjects
Details
- Language :
- English
- ISSN :
- 00188646
- Volume :
- 41
- Issue :
- 1/2
- Database :
- Academic Search Index
- Journal :
- IBM Journal of Research & Development
- Publication Type :
- Academic Journal
- Accession number :
- 9706012817
- Full Text :
- https://doi.org/10.1147/rd.411.0003