Dielectric properties of La/Mn codoped Ba0.63Sr0.37TiO3 thin films prepared by RF magnetron sputtering.

La/Mn codoped Ba0.63Sr0.37TiO3 (BST) films were grown on LaNiO3-coated Si substrates via RF magnetron sputtering. We also fabricated pure BST and La-doped BST films for comparison. Results show that moderate La/Mn codoping improves dielectric tunability (59.6%) as compared to pure BST (28.2%) at 700 kV/cm, and yields lower dielectric loss (tanδ=0.0170) and higher figure of merit (FOM=35.06) comparing with La-doped BST (tanδ=0.0242, FOM=26.32). This work demonstrated that La/Mn codoping could be an effective method to obtain high tunability and low loss tangent. [ABSTRACT FROM AUTHOR]