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MOCVD grown ZnO thin film gas sensors: Influence of microstructure.

Authors :
Pati, Sumati
Banerji, P.
Majumder, S.B.
Source :
Sensors & Actuators A: Physical. Jul2014, Vol. 213, p52-58. 7p.
Publication Year :
2014

Abstract

Highlights: [•] Textured ZnO ultra thin films are grown using MOCVD technique. [•] Growth mode dependent microstructures are fabricated. [•] The microstructure formation is understood on the basis of van der Drift model. [•] Hall effect measurement provides reliable results. [•] Correlation between the microstructures and the gas sensing behavior is explained. [ABSTRACT FROM AUTHOR]

Subjects

Subjects :
*ZINC oxide thin films
*METAL organic chemical vapor deposition
*CRYSTAL growth
*GAS detectors
*METAL microstructure
*METALS
*CRYSTAL texture

Details

Language :
English
ISSN :
09244247
Volume :
213
Database :
Academic Search Index
Journal :
Sensors & Actuators A: Physical
Publication Type :
Academic Journal
Accession number :
96026170
Full Text :
https://doi.org/10.1016/j.sna.2014.04.005
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