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Crystallization and disappearance of defects of the annealed silicon nanowires

Authors :
Niu, Junjie
Sha, Jian
Wang, Youwen
Ma, Xiangyang
Yang, Deren
Source :
Microelectronic Engineering. Apr2003, Vol. 66 Issue 1-4, p65. 5p.
Publication Year :
2003

Abstract

The crystallization and the disappearance of the defects and impurity stress of silicon nanowires (SiNWs) after annealing at high temperature (900 °C) have been investigated. The chemical-vapor-deposition (CVD) and alumina template technology were used for the synthesis of the SiNWs. Then transmission electron microscopy (TEM), selected-area electron diffraction (SAED) and photoluminescence (PL) spectra were used to study the crystallization procedure and the disappearance of defects of the SiNWs. [Copyright &y& Elsevier]

Details

Language :
English
ISSN :
01679317
Volume :
66
Issue :
1-4
Database :
Academic Search Index
Journal :
Microelectronic Engineering
Publication Type :
Academic Journal
Accession number :
9545386
Full Text :
https://doi.org/10.1016/S0167-9317(03)00026-1