Investigation of Thermal Diffusivity of Nano-Structured TiO2 Films.

We investigate the thermal diffusivity of nano-structured TiO2 and TiO2 with 3% ZnFe2O4 ceramic films (nm films) sputtered on a <111> cut Si substrates by using the Mirage effect method. Two series of films are prepared by the magneto-rf-spurt method. The investigation results show that: The thermal diffusivity of nano-structured film depends on the thickness of film and the annealing temperature. The thicker the film, the lower thermal diffusivity of the sample is. The value of thermal diffusivity increases with the increasing of the annealing temperature. It means that the thermal diffusivity depends on the phase structure of the film. The detail results, analyses and discussions will be presented in this paper. © 2003 American Institute of Physics [ABSTRACT FROM AUTHOR]