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Lithographic machining for large objects.
- Source :
-
Mechanical Engineering . Jul1994, Vol. 116 Issue 7, p16. 1/3p. 1 Black and White Photograph. - Publication Year :
- 1994
-
Abstract
- Reports on the use of high-energy x-rays in a new lithographic technique developed by the US Department of Energy's Brookhaven National Laboratory in Upton, New York and the University of Wisconsin in Madison. Fabrication of large mechanical components with the precision of micromachines; Use of ultraviolet light or low-energy x-rays in the lithographic fabrication of micromachines.
- Subjects :
- *LITHOGRAPHY
*X-rays in industry
Subjects
Details
- Language :
- English
- ISSN :
- 00256501
- Volume :
- 116
- Issue :
- 7
- Database :
- Academic Search Index
- Journal :
- Mechanical Engineering
- Publication Type :
- Periodical
- Accession number :
- 9411082121