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Lithographic machining for large objects.

Authors :
Scuria-Fontana, Camille
Source :
Mechanical Engineering. Jul1994, Vol. 116 Issue 7, p16. 1/3p. 1 Black and White Photograph.
Publication Year :
1994

Abstract

Reports on the use of high-energy x-rays in a new lithographic technique developed by the US Department of Energy's Brookhaven National Laboratory in Upton, New York and the University of Wisconsin in Madison. Fabrication of large mechanical components with the precision of micromachines; Use of ultraviolet light or low-energy x-rays in the lithographic fabrication of micromachines.

Subjects

Subjects :
*LITHOGRAPHY
*X-rays in industry

Details

Language :
English
ISSN :
00256501
Volume :
116
Issue :
7
Database :
Academic Search Index
Journal :
Mechanical Engineering
Publication Type :
Periodical
Accession number :
9411082121