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Volumetric phase-measuring interferometer for three-dimensional coordinate metrology
- Source :
-
Precision Engineering . Apr2003, Vol. 27 Issue 2, p205. 11p. - Publication Year :
- 2003
-
Abstract
- We present a volumetric interferometer that has been specially designed to improve the measurement accuracy of the three-dimensional coordinate metrology by reducing excessive Abbe offsets. The interferometer is composed of two main parts; one is a three-dimensionally movable target and the other is a stationary two-dimensional array of photo-detectors. The target made of point diffraction sources emanates two spherical wavefronts, of which interference intensity is monitored by the photo-detectors. Applying phase shifting allows the phases of the photo-detectors to be precisely obtained, and the measured phases are fitted to a geometric model of multilateration so as to determine the xyz-location of the target by minimizing least square errors. A prototype built on a CMM demonstrates that the proposed interferometer is capable of measuring the xyz-coordinates of the probe with a volumetric uncertainty of less than 1.0 μm. [Copyright &y& Elsevier]
- Subjects :
- *VOLUMETRIC analysis
*INTERFEROMETERS
Subjects
Details
- Language :
- English
- ISSN :
- 01416359
- Volume :
- 27
- Issue :
- 2
- Database :
- Academic Search Index
- Journal :
- Precision Engineering
- Publication Type :
- Academic Journal
- Accession number :
- 9343163
- Full Text :
- https://doi.org/10.1016/S0141-6359(02)00228-3