Scheduling Lot Switching Operations for Cluster Tools.

MLA

Lee, Jun-Ho, et al. “Scheduling Lot Switching Operations for Cluster Tools.” IEEE Transactions on Semiconductor Manufacturing, vol. 26, no. 4, Nov. 2013, pp. 592–601. EBSCOhost, https://doi.org/10.1109/TSM.2013.2281083.

APA

Lee, J.-H., Kim, H.-J., & Lee, T.-E. (2013). Scheduling Lot Switching Operations for Cluster Tools. IEEE Transactions on Semiconductor Manufacturing, 26(4), 592–601. https://doi.org/10.1109/TSM.2013.2281083

Chicago

Lee, Jun-Ho, Hyun-Jung Kim, and Tae-Eog Lee. 2013. “Scheduling Lot Switching Operations for Cluster Tools.” IEEE Transactions on Semiconductor Manufacturing 26 (4): 592–601. doi:10.1109/TSM.2013.2281083.