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Adsorption and reaction of titanium on an oxidized Si(001) surface.

Authors :
Ohno, S.
Abe, S.
Takahashi, K.
Kamada, M.
Tanaka, M.
Source :
Journal of Electron Spectroscopy & Related Phenomena. Aug2013, Vol. 189, p56-60. 5p.
Publication Year :
2013

Abstract

Highlights: [•] Deposition of titanium on oxidized silicon surfaces. [•] Characterization of oxide thin films on Si surfaces using photoelectron spectroscopy with synchrotron radiation. [•] Chemical shift due to charge transfer. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
03682048
Volume :
189
Database :
Academic Search Index
Journal :
Journal of Electron Spectroscopy & Related Phenomena
Publication Type :
Academic Journal
Accession number :
91738911
Full Text :
https://doi.org/10.1016/j.elspec.2013.06.009