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Three-dimensional atomic force microscopy.
- Source :
-
Solid State Technology . Oct2013, Vol. 56 Issue 7, p20-22. 3p. - Publication Year :
- 2013
-
Abstract
- The article presents a study which explores the potential of three-dimensional (3D) atomic force microscopy (AFM) in measuring smaller critical dimensions (CDs). The significance of 3D AFM in the fabrication of integrated circuits (ICs) is highlighted. A comparison on the benefits of using 3D AFM and scanning electron microscopy (SEM) systems is offered.
Details
- Language :
- English
- ISSN :
- 0038111X
- Volume :
- 56
- Issue :
- 7
- Database :
- Academic Search Index
- Journal :
- Solid State Technology
- Publication Type :
- Academic Journal
- Accession number :
- 91719084