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A Gap-Closing Electrostatic Actuator With a Linear Extended Range.
- Source :
-
Journal of Microelectromechanical Systems . Oct2013, Vol. 22 Issue 5, p1109-1114. 6p. - Publication Year :
- 2013
-
Abstract
- We present a gap-closing electrostatic actuator with a linear extended range. We achieve this by designing a nonlinear spring that exactly counteracts the nonlinear effects of electrostatic attraction forces in gap-closing actuators. We demonstrate this on parallel-plates actuators with a nominal gap of g=21~\mum. The initial response up to a deflection of g/4 is stable and is inevitably nonlinear, but beyond this point we demonstrate good linearity up to a displacement of 85% of the nominal gap. By introducing the nonlinear spring, we also avoid the pull-in instability, which would have occurred at a voltage of 31 V. Instead, the system is stable and the driving voltage may be increased up to 130 V where the maximal displacement is achieved. \hfill[2013-0132] [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 22
- Issue :
- 5
- Database :
- Academic Search Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 90678557
- Full Text :
- https://doi.org/10.1109/JMEMS.2013.2276027