Development of a lead-zirconate-titanate (PZT) thin-film microactuator probe for intracochlear applications.

Highlights: [•] We designed, fabricated, and tested a PZT probe for inner ear applications. [•] The probe consists of a cantilever, a PZT diaphragm, and a parylene package. [•] The design goals include parylene thickness and implantation depth of the probe. [•] The probe was tested in air, and remained functional in water for 55h. [•] Water infiltrates into PZT to enhance dielectric constant and probe displacement. [Copyright &y& Elsevier]