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Combined effects of sample parameters on polymer charging due to electron irradiation: A contour simulation.

Authors :
Feng, Guo-Bao
Cao, Meng
Yan, Li-Ping
Zhang, Hai-Bo
Source :
Micron. Sep2013, Vol. 52-53, p62-66. 5p.
Publication Year :
2013

Abstract

Highlights: [ • ] Electron-induced polymer charging is described by contour maps for the first time. [ • ] Leakage current and surface potential are highly correlated in contour features. [ • ] The total charge has the local maximum with respect to sample thickness. [•] Sample thickness normally affects charging effects more than electron mobility. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
09684328
Volume :
52-53
Database :
Academic Search Index
Journal :
Micron
Publication Type :
Academic Journal
Accession number :
90432450
Full Text :
https://doi.org/10.1016/j.micron.2013.07.006