Fabrication of a 3GHz oscillator based on Nano-Carbon-Diamond-film-based guided wave resonators.

Highlights: [•] High frequency resonators developed for frequency source applications. [•] Resonators manufactured using Electron Beam Lithography on ZnO/Diamond substrate (nucleation side). [•] Single and double port resonators built in the 3–6GHz frequency range. [•] Double port resonators found compatible with the oscillator application. [•] Oscillator demonstration at 3GHz : −90dBcHz−1 at 1kHz and a floor noise of −165dBcHz−1. [ABSTRACT FROM AUTHOR]