Wafer-Scale Flexible Surface Acoustic Wave Devices Based on an AlN/Si Structure.

MLA

ZHANG Cang-Hai, et al. “Wafer-Scale Flexible Surface Acoustic Wave Devices Based on an AlN/Si Structure.” Chinese Physics Letters, vol. 30, no. 7, July 2013, pp. 1–4. EBSCOhost, https://doi.org/10.1088/0256-307X/30/7/077701.

APA

ZHANG Cang-Hai, YANG Yi, ZHOU Chang-Jian, SHU Yi, TIAN He, WANG Zhe, XUE Qing-Tang, & REN Tian-Ling. (2013). Wafer-Scale Flexible Surface Acoustic Wave Devices Based on an AlN/Si Structure. Chinese Physics Letters, 30(7), 1–4. https://doi.org/10.1088/0256-307X/30/7/077701

Chicago

ZHANG Cang-Hai, YANG Yi, ZHOU Chang-Jian, SHU Yi, TIAN He, WANG Zhe, XUE Qing-Tang, and REN Tian-Ling. 2013. “Wafer-Scale Flexible Surface Acoustic Wave Devices Based on an AlN/Si Structure.” Chinese Physics Letters 30 (7): 1–4. doi:10.1088/0256-307X/30/7/077701.