Cite
Defects in silicon oxynitride films
MLA
Futatsudera, M., et al. “Defects in Silicon Oxynitride Films.” Thin Solid Films, vol. 424, no. 1, Jan. 2003, p. 148. EBSCOhost, https://doi.org/10.1016/S0040-6090(02)00917-3.
APA
Futatsudera, M., Kimura, T., Matsumoto, A., Inokuma, T., Kurata, Y., & Hasegawa, S. (2003). Defects in silicon oxynitride films. Thin Solid Films, 424(1), 148. https://doi.org/10.1016/S0040-6090(02)00917-3
Chicago
Futatsudera, M., T. Kimura, A. Matsumoto, T. Inokuma, Y. Kurata, and S. Hasegawa. 2003. “Defects in Silicon Oxynitride Films.” Thin Solid Films 424 (1): 148. doi:10.1016/S0040-6090(02)00917-3.