Analysis of two dimensional composite surface grating structures with applications to low loss microacoustic resonators.

2D composite grating building blocks with hexagonal symmetry are proposed and analyzed as efficient reflectors and transducers in the design of low loss surface acoustic wave (SAW) resonators. Eigen-frequency and frequency response finite element analyses are used to study the propagation and excitation characteristics of SAWs in the 2D composite structures. The proposed structures have the advantage of being compatible with the planar SAW technology, while introducing design principles reminiscent to the semiconductor devices. More specifically, the frequency bandgap characteristics of the various resonator building blocks can be adjusted so that losses related to the SAW diffraction, impedance mismatch, and parasitic SAW radiation from the electrical contacts can be suppressed. Three distinct types SAW resonant topologies employing 2D gratings are deduced from the analytical results. [ABSTRACT FROM AUTHOR]