Dependence of the relative sensitivity factor of nitrogen on various oxynitride dielectric matrixes.

MLA

Zhu, Lei, et al. “Dependence of the Relative Sensitivity Factor of Nitrogen on Various Oxynitride Dielectric Matrixes.” Thin Solid Films, vol. 542, Sept. 2013, pp. 134–38. EBSCOhost, https://doi.org/10.1016/j.tsf.2013.06.094.

APA

Zhu, L., Teo, H. W., Huang, Y. H., Ong, K., & Hua, Y. N. (2013). Dependence of the relative sensitivity factor of nitrogen on various oxynitride dielectric matrixes. Thin Solid Films, 542, 134–138. https://doi.org/10.1016/j.tsf.2013.06.094

Chicago

Zhu, Lei, H.W. Teo, Y.H. Huang, Kenny Ong, and Y.N. Hua. 2013. “Dependence of the Relative Sensitivity Factor of Nitrogen on Various Oxynitride Dielectric Matrixes.” Thin Solid Films 542 (September): 134–38. doi:10.1016/j.tsf.2013.06.094.