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A novel way of detecting transient cavitation near a solid surface during megasonic cleaning using electrochemical impedance spectroscopy.
- Source :
-
Microelectronic Engineering . Aug2013, Vol. 108, p11-15. 5p. - Publication Year :
- 2013
-
Abstract
- Highlights: [·] Impedance measurements on a microelectrode to detect transient cavitation. [·] Transient cavitation collapses determined to be of the order of 25Hz. [·] Diffusion layer thickness computed in the presence and absence of megasonic field. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 01679317
- Volume :
- 108
- Database :
- Academic Search Index
- Journal :
- Microelectronic Engineering
- Publication Type :
- Academic Journal
- Accession number :
- 89294688
- Full Text :
- https://doi.org/10.1016/j.mee.2013.02.097