Dependence of surface smoothing, sputtering and etching phenomena on cluster ion dosage

MLA

Song, Jae-Hoon, et al. “Dependence of Surface Smoothing, Sputtering and Etching Phenomena on Cluster Ion Dosage.” Nuclear Instruments & Methods in Physics Research Section B, vol. 196, no. 3/4, Nov. 2002, p. 268. EBSCOhost, https://doi.org/10.1016/S0168-583X(02)01295-8.

APA

Song, J.-H., Choi, D.-K., & Choi, W.-K. (2002). Dependence of surface smoothing, sputtering and etching phenomena on cluster ion dosage. Nuclear Instruments & Methods in Physics Research Section B, 196(3/4), 268. https://doi.org/10.1016/S0168-583X(02)01295-8

Chicago

Song, Jae-Hoon, Duck-Kyun Choi, and Won-Kook Choi. 2002. “Dependence of Surface Smoothing, Sputtering and Etching Phenomena on Cluster Ion Dosage.” Nuclear Instruments & Methods in Physics Research Section B 196 (3/4): 268. doi:10.1016/S0168-583X(02)01295-8.