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Measuring gas flow with MEMS sensors.
- Source :
-
Electronic Products . Feb2013, Vol. 55 Issue 9, p18-21. 3p. - Publication Year :
- 2013
-
Abstract
- The article features the MEMSIC MFA1100R gas-flow sensor which uses the thermal principle of operation similar to that of the thermal accelerometer of MEMSIC Inc. The sensors based on thermal microelectromechanical systems (MEMS) have the capacity to provide motion sensing in accelerometers. Gas-flow measurement is needed in the medical market such as that in anesthesia delivery, chromatography, sleep apnea, spirometers, and ventilators.
- Subjects :
- *GAS flow
*DETECTORS
*ACCELEROMETERS
*MICROELECTROMECHANICAL systems
Subjects
Details
- Language :
- English
- ISSN :
- 00134953
- Volume :
- 55
- Issue :
- 9
- Database :
- Academic Search Index
- Journal :
- Electronic Products
- Publication Type :
- Periodical
- Accession number :
- 85476467