Highly Reliable MEMS Temperature Sensors for 275 ^ \circ\C Applications—Part 1: Design and Technology.

MLA

Scott, Sean, et al. “Highly Reliable MEMS Temperature Sensors for 275 ^ \circ\C Applications—Part 1: Design and Technology.” Journal of Microelectromechanical Systems, vol. 22, no. 1, Feb. 2013, pp. 225–35. EBSCOhost, https://doi.org/10.1109/JMEMS.2012.2227947.

APA

Scott, S., Sadeghi, F., & Peroulis, D. (2013). Highly Reliable MEMS Temperature Sensors for 275 ^ \circ\C Applications—Part 1: Design and Technology. Journal of Microelectromechanical Systems, 22(1), 225–235. https://doi.org/10.1109/JMEMS.2012.2227947

Chicago

Scott, Sean, Farshid Sadeghi, and Dimitrios Peroulis. 2013. “Highly Reliable MEMS Temperature Sensors for 275 ^ \circ\C Applications—Part 1: Design and Technology.” Journal of Microelectromechanical Systems 22 (1): 225–35. doi:10.1109/JMEMS.2012.2227947.