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Integrated scatter plate and projection lens for scatter plate interferometer
- Source :
-
Review of Scientific Instruments . Apr98, Vol. 69 Issue 4, p1587. 4p. 4 Black and White Photographs, 2 Diagrams. - Publication Year :
- 1998
-
Abstract
- Describes the integration of a scatter plate and projection lens to a single binary micro-optical element. Features of the scatter plate interferometer; Use of the scatter plate interferometer to test the quality of concave mirrors; Fabrication of the integrated element using electron beam lithography.
- Subjects :
- *OPTICAL instruments
*ELECTRON beam lithography
Subjects
Details
- Language :
- English
- ISSN :
- 00346748
- Volume :
- 69
- Issue :
- 4
- Database :
- Academic Search Index
- Journal :
- Review of Scientific Instruments
- Publication Type :
- Academic Journal
- Accession number :
- 835660