Cite
Growth of thin Al2O3 films on biaxially oriented polymer films by atomic layer deposition
MLA
Vähä-Nissi, Mika, et al. “Growth of Thin Al2O3 Films on Biaxially Oriented Polymer Films by Atomic Layer Deposition.” Thin Solid Films, vol. 522, Nov. 2012, pp. 50–57. EBSCOhost, https://doi.org/10.1016/j.tsf.2012.09.043.
APA
Vähä-Nissi, M., Kauppi, E., Sahagian, K., Johansson, L.-S., Peresin, M. S., Sievänen, J., & Harlin, A. (2012). Growth of thin Al2O3 films on biaxially oriented polymer films by atomic layer deposition. Thin Solid Films, 522, 50–57. https://doi.org/10.1016/j.tsf.2012.09.043
Chicago
Vähä-Nissi, Mika, Emilia Kauppi, Khoren Sahagian, Leena-Sisko Johansson, Maria Soledad Peresin, Jenni Sievänen, and Ali Harlin. 2012. “Growth of Thin Al2O3 Films on Biaxially Oriented Polymer Films by Atomic Layer Deposition.” Thin Solid Films 522 (November): 50–57. doi:10.1016/j.tsf.2012.09.043.