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Natural lithography nano-sphere texturing as antireflective layer on InP-based pin photodiodes.

Authors :
Chen, Baile
Zhou, Qiugui
McIntosh, D.C.
Yuan, Jinrong
Chen, Yaojia
Sun, Wenlu
Campbell, J.C.
Holmes, A.L.
Source :
Electronics Letters (Institution of Engineering & Technology). 10/11/2012, Vol. 48 Issue 21, p1340-1341. 2p.
Publication Year :
2012

Abstract

An antireflection coating was created for InP-based pin photodiodes using natural lithography with 100 nm-diameter SiO2 spheres. The surface showed a normal-incidence reflection of <5% for wavelengths from 900 to 2500 nm. Photodiodes with surface texturing showed an enhancement in quantum efficiency with no dark current degradation. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00135194
Volume :
48
Issue :
21
Database :
Academic Search Index
Journal :
Electronics Letters (Institution of Engineering & Technology)
Publication Type :
Academic Journal
Accession number :
82713286
Full Text :
https://doi.org/10.1049/el.2012.2849