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Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas.
- Source :
-
Physics of Plasmas . May2011, Vol. 18 Issue 5, p053501. 6p. - Publication Year :
- 2011
-
Abstract
- The electron energy probability functions (EEPFs) were measured with increasing gas pressure in 60/13.56 MHz dual-frequency capacitively coupled plasma (DF-CCP) using compensated Langmiur electrostatic probe. The transition pressure of heating mode from collisionless to collisional heating in 60/13.56 MHz DF-CCP is found to be significantly lower than that in 13.56 MHz single-frequency CCP. As the pressure increases, the EEPFs change from bi-Maxwellian to Druyvesteyn type which is similar with that in 60 MHz single-frequency CCP. The pressure dependence of electron densities, effective electron temperatures, floating potentials, and plasma potentials in 60/13.56 MHz DF-CCP were measured and were compared with that in 60 MHz single-frequency CCP. The pressure dependence of these plasma parameters in 60/13.56 MHz DF-CCP is similar with that in 60 MHz single-frequency CCP. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 1070664X
- Volume :
- 18
- Issue :
- 5
- Database :
- Academic Search Index
- Journal :
- Physics of Plasmas
- Publication Type :
- Academic Journal
- Accession number :
- 79864857
- Full Text :
- https://doi.org/10.1063/1.3587108