Back to Search Start Over

Thin film poly-Si solar cells using PECVD and Cat-CVD with light confinement structure by RIE

Authors :
Niira, K.
Senta, H.
Hakuma, H.
Komoda, M.
Okui, H.
Fukui, K.
Arimune, H.
Shirasawa, K.
Source :
Solar Energy Materials & Solar Cells. Oct2002, Vol. 74 Issue 1-4, p247. 7p.
Publication Year :
2002

Abstract

Poly-Si film prepared by PECVD method showed low ESR spin density of around 1E16/cm3 and poly-Si film prepared by Cat-CVD method showed relatively low ESR spin density of around 1E17/cm3. The cell using PECVD poly-Si film as a photo-active layer showed an intrinsic cell efficiency of 7.75%. Light confinement micro-structure was introduced to the cell applying RIE method to the glass substrate surface and enhancement of Jsc was observed. [Copyright &y& Elsevier]

Details

Language :
English
ISSN :
09270248
Volume :
74
Issue :
1-4
Database :
Academic Search Index
Journal :
Solar Energy Materials & Solar Cells
Publication Type :
Academic Journal
Accession number :
7861650
Full Text :
https://doi.org/10.1016/S0927-0248(02)00080-6