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Thin film poly-Si solar cells using PECVD and Cat-CVD with light confinement structure by RIE
- Source :
-
Solar Energy Materials & Solar Cells . Oct2002, Vol. 74 Issue 1-4, p247. 7p. - Publication Year :
- 2002
-
Abstract
- Poly-Si film prepared by PECVD method showed low ESR spin density of around 1E16/cm3 and poly-Si film prepared by Cat-CVD method showed relatively low ESR spin density of around 1E17/cm3. The cell using PECVD poly-Si film as a photo-active layer showed an intrinsic cell efficiency of 7.75%. Light confinement micro-structure was introduced to the cell applying RIE method to the glass substrate surface and enhancement of Jsc was observed. [Copyright &y& Elsevier]
- Subjects :
- *SILICON
*THIN films
*ELECTRON paramagnetic resonance
Subjects
Details
- Language :
- English
- ISSN :
- 09270248
- Volume :
- 74
- Issue :
- 1-4
- Database :
- Academic Search Index
- Journal :
- Solar Energy Materials & Solar Cells
- Publication Type :
- Academic Journal
- Accession number :
- 7861650
- Full Text :
- https://doi.org/10.1016/S0927-0248(02)00080-6