Auto-organizing ZrAlN/ZrAlTiN/TiN multilayers

Abstract: The possibility to form secondary phases during annealing of a two-phase ternary nitride material is studied. By the use of an initial multilayer structure the new phase forms at the sublayer interfaces, resulting in an enhanced layering of the film. This is illustrated by a ZrAlN/TiN thin film where formation of a cubic structure ZrTi(Al)N phase at the sublayer interfaces improves the mechanical properties after annealing above 900°C. [Copyright &y& Elsevier]