Back to Search
Start Over
Micro-scale patterning of indium tin oxide film by spatially modulated pulsed Nd:YAG laser beam
Micro-scale patterning of indium tin oxide film by spatially modulated pulsed Nd:YAG laser beam
- Source :
-
Applied Surface Science . Sep2012, Vol. 258 Issue 23, p9107-9111. 5p. - Publication Year :
- 2012
-
Abstract
- Abstract: Here we demonstrate that indium tin oxide (ITO) films deposited on glass can be directly patterned by a spatially -modulated pulsed Nd-YAG laser beam (wavelength=1064nm, pulse width=6ns) incident onto the film. This method utilizes a pulsed laser-induced thermo-elastic force exerting on the film which plays a role to detach it from the substrate. Sharp-edged clean patterns with feature size as small as 4μm could be obtained. The threshold pulse energy density for patterning was estimated to be ∼0.8J/cm2 for 150nm-thick ITO film, making it possible to pattern over one square centimeter by a single pulse with energy of 850mJ. Not only being free from photoresist and chemical etching steps, the presented method can also provide much higher throughput than the tradition photoablation process utilizing a tightly focused beam. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 01694332
- Volume :
- 258
- Issue :
- 23
- Database :
- Academic Search Index
- Journal :
- Applied Surface Science
- Publication Type :
- Academic Journal
- Accession number :
- 78278166
- Full Text :
- https://doi.org/10.1016/j.apsusc.2011.07.111