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Micro-scale patterning of indium tin oxide film by spatially modulated pulsed Nd:YAG laser beam

Micro-scale patterning of indium tin oxide film by spatially modulated pulsed Nd:YAG laser beam

Authors :
Lee, Jinsoo
Kim, Seongsu
Lee, Myeongkyu
Source :
Applied Surface Science. Sep2012, Vol. 258 Issue 23, p9107-9111. 5p.
Publication Year :
2012

Abstract

Abstract: Here we demonstrate that indium tin oxide (ITO) films deposited on glass can be directly patterned by a spatially -modulated pulsed Nd-YAG laser beam (wavelength=1064nm, pulse width=6ns) incident onto the film. This method utilizes a pulsed laser-induced thermo-elastic force exerting on the film which plays a role to detach it from the substrate. Sharp-edged clean patterns with feature size as small as 4μm could be obtained. The threshold pulse energy density for patterning was estimated to be ∼0.8J/cm2 for 150nm-thick ITO film, making it possible to pattern over one square centimeter by a single pulse with energy of 850mJ. Not only being free from photoresist and chemical etching steps, the presented method can also provide much higher throughput than the tradition photoablation process utilizing a tightly focused beam. [Copyright &y& Elsevier]

Details

Language :
English
ISSN :
01694332
Volume :
258
Issue :
23
Database :
Academic Search Index
Journal :
Applied Surface Science
Publication Type :
Academic Journal
Accession number :
78278166
Full Text :
https://doi.org/10.1016/j.apsusc.2011.07.111