Plasma sources of ions of solids.

Three variants of the design of ion sources are described: (1) with a hollow cathode and an anode-evaporator system in the rear part of the source, (2) with a cylindrical anode, and (3) with a hollow cathode and an anode in the front part. It is shown that these sources are most suitable for obtaining ion beams of solid-state elements and provide ion currents of ∼70-100 μA (for Al, Bi, As, Sb), 25 μA (Eu), and 15-30 μA (Fe, V, Cr, and doubly charged and molecular ions). Such sources are characterized by a relatively long operation time (tens of hours) and a low energy consumption level (300-400 W). The operational principle of ion sources is described with consideration for the differences in their designs. The experimental results are presented: the dependences of the ion currents on the discharge current, cathode current, and induction of the magnetic field of the source's electromagnet, as well as the results of the computer simulations that are based on a numerical model of the ionization of atoms in the source. [ABSTRACT FROM AUTHOR]