Back to Search
Start Over
Plasma sheath thickness in radio-frequency discharges.
- Source :
-
Journal of Applied Physics . 9/15/1990, Vol. 68 Issue 6, p2657. 4p. 1 Chart, 3 Graphs. - Publication Year :
- 1990
-
Abstract
- Examines the radio-frequency glow discharges of several kinds of gases to measure the ion sheath thickness at the cathode electrode. Role of the secondary electron emission from the electrode surface in the discharges; Electrical characterization of the relative frequency plasma processing system; Pressure dependence of the sheath thickness in the argon discharge.
- Subjects :
- *RADIO frequency discharges
*CATHODES
*ARGON
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 68
- Issue :
- 6
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7669843
- Full Text :
- https://doi.org/10.1063/1.346491