Surface-related low-frequency noise of sputtered copper film.

Presents the first attempt in correlating the low-frequency noise with the surface characteristics of metal films prepared by sputtering of copper onto oxidized-silicon and sapphire substrates. Noise behaviors and the surface physics of metal films on the substrates; Dependence of the spectral slope of noise spectrum on the thickness and surface area of the metal films; Basic mechanism of the surface noise in metal film.