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Scanning tunneling microscope investigation of the growth morphology of titanium silicide on Si(111) substrates.
- Source :
-
Journal of Applied Physics . 10/15/1995, Vol. 78 Issue 8, p5143. 12p. 8 Black and White Photographs, 2 Charts. - Publication Year :
- 1995
-
Abstract
- Details a study which investigated the growth, morphology and surface atomic structure of ultrathin silicide films on silicon substrates. Experimental procedures; Agglomeration of ultrathin titanium silicide; Temperature dependence of crystalline formation; Correlation between silicide agglomeration and crystalline growth.
- Subjects :
- *SILICIDES
*THIN films
*TITANIUM compounds
*AGGLOMERATION (Materials)
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 78
- Issue :
- 8
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7663773
- Full Text :
- https://doi.org/10.1063/1.359747