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Analytical thermal model of ultraviolet laser ablation with single-photon absorption in the plume.
- Source :
-
Journal of Applied Physics . 7/15/1995, Vol. 78 Issue 2, p1241. 6p. 2 Diagrams, 3 Graphs. - Publication Year :
- 1995
-
Abstract
- Proposes an analytical thermal model of ultraviolet (UV) laser ablation. Explanation for the changing slope of the curve of etch depth and logarithmic fluence; Information on the technical applications of laser ablation of materials; Discussion on the temperature and velocity of laser ablating surface without vapor plasma screening.
- Subjects :
- *ULTRAVIOLET radiation
*LASER ablation
*PLASMA gases
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 78
- Issue :
- 2
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7662377
- Full Text :
- https://doi.org/10.1063/1.360365