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Simulation of a surface-reflection neutral stream source.

Authors :
Nichols, Christopher A.
Manos, Dennis M.
Source :
Journal of Applied Physics. 9/1/1996, Vol. 80 Issue 5, p2643. 7p. 2 Diagrams, 2 Charts, 6 Graphs.
Publication Year :
1996

Abstract

Focuses on a study which developed a computational model to optimize the design of a surface reflection neutralization source of hyperthermal neutrals for charge-free processing. Theoretical background; Methodology; Findings.

Details

Language :
English
ISSN :
00218979
Volume :
80
Issue :
5
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7660520
Full Text :
https://doi.org/10.1063/1.363180