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Early stages of diamond growth by chemical-vapor deposition monitored both by electron spectroscopies and microstructural probes.

Authors :
Le Normand, F.
Arnault, J. C.
Parasote, V.
Fayette, L.
Marcus, B.
Mermoux, M.
Source :
Journal of Applied Physics. 8/1/1996, Vol. 80 Issue 3, p1830. 16p.
Publication Year :
1996

Abstract

Presents information on a study which examined nucleation and growth kinetics of chemical vapor deposition diamond thin films on silicon. Background of the study; Methodology of the study; Results and discussion.

Details

Language :
English
ISSN :
00218979
Volume :
80
Issue :
3
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7658643
Full Text :
https://doi.org/10.1063/1.362995