Systematics of secondary-ion-mass spectrometry relative sensitivity factors versus electron affinity and ionization potential for a variety of matrices determined from implanted standards of more than 70 elements.

Presents a study which measured and plotted the dependence of secondary-ion-mass spectrometry (SIMS) relative sensitivity factor (RSF) on electron affinity and ionization potential using oxygen-ion atom bombardment and positive SIMS, and cesium-ion bombardment and negative SIMS. Reproducibility in RSF; Regions in the dependence of logRSF on ionization potential; Values of slope of logRSF versus ionization potential for the matrices studied.