Morphology of hydrofluoric acid and ammonium fluoride-treated silicon surfaces studied by surface infrared spectroscopy.

Authors :: Niwano, M.
Takeda, Y.
Ishibashi, Y.
Kurita, K.
Miyamoto, N.
Source :: Journal of Applied Physics. 6/1/1992, Vol. 71 Issue 11, p5646. 4p. 3 Graphs.
Publication Year :: 1992
Abstract: Presents a study which examined the morphology of hydrofluoric acid (HF) and ammonium fluoride-treated silicon surfaces with surface infrared spectroscopy. Effect of the variation of HF concentration on the morphology; Experimental methods; Results and discussion.

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