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Ion beam impact and penetration of polymethyl methacrylate.
- Source :
-
Journal of Applied Physics . 10/1/1985, Vol. 58 Issue 7, p2534. 5p. 1 Chart, 6 Graphs. - Publication Year :
- 1985
-
Abstract
- Presents a study that calculated the depth distribution of energy dissipation and ion implantation ranges in the polymer resist polymethyl methacrylate (PMMA). Methodology; Correlation between the electronic and nuclear energy losses and penetration depth; Examination of the emission yield of PMMA during the initial stage of ion bombardment and electronic energy loss.
- Subjects :
- *ENERGY dissipation
*ION implantation
*POLYMETHYLMETHACRYLATE
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 58
- Issue :
- 7
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7655613
- Full Text :
- https://doi.org/10.1063/1.335932