Deposition and analysis of lithium niobate and other lithium niobium oxides by rf magnetron sputtering.

Presents information on a study which investigated the deposition of thin films of lithium niobate on silicon with radio frequency magnetron sputtering. Variables thought to critically affect the properties of the resulting films; Use of x-ray diffractometry using a cooper tube; Results of the Rutherford backscattering spectra.