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Deposition and analysis of lithium niobate and other lithium niobium oxides by rf magnetron sputtering.
- Source :
-
Journal of Applied Physics . 11/1/1992, Vol. 72 Issue 9, p4336. 8p. - Publication Year :
- 1992
-
Abstract
- Presents information on a study which investigated the deposition of thin films of lithium niobate on silicon with radio frequency magnetron sputtering. Variables thought to critically affect the properties of the resulting films; Use of x-ray diffractometry using a cooper tube; Results of the Rutherford backscattering spectra.
- Subjects :
- *THIN films
*LITHIUM niobate
*SPUTTERING (Physics)
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 72
- Issue :
- 9
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7655412
- Full Text :
- https://doi.org/10.1063/1.352197