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Texture, microstructure, and magnetic properties of Fe-Co alloy films formed by sputtering at an oblique angle of incidence.

Authors :
Ono, H.
Ishida, M.
Fujinaga, M.
Shishido, H.
Inaba, H.
Source :
Journal of Applied Physics. 10/15/1993, Vol. 74 Issue 8, p5124. 5p. 9 Diagrams, 1 Chart.
Publication Year :
1993

Abstract

Focuses on the structure and magnetic properties of iron-cobalt (Co) alloy films produced by direct current magnetron sputtering at an oblique angle of incidence. Overview of the uniaxial magnetic anisotropy in the film plane; Effect of increasing the anisotropy field on the sputtering gas and Co content; Surface morphology of the alloy films.

Details

Language :
English
ISSN :
00218979
Volume :
74
Issue :
8
Database :
Academic Search Index
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
7654710
Full Text :
https://doi.org/10.1063/1.354299