Characterization of thermodynamically non-equilibrium high-temperature oxygen plasma downstream region.

Authors :: Wickramanayaka, Sunil
Meikle, S.
Sekiguchi, A.
Hosokawa, M.
Hatanaka, Y.
Source :: Journal of Applied Physics. 5/1/1991, Vol. 69 Issue 9, p6340. 3p. 1 Diagram, 3 Graphs.
Publication Year :: 1991
Abstract: Focuses on a study that confirmed the higher reactivity and density of thermodynamically non-equilibrium high-temperature plasmas than that of glow-discharge plasmas. Benefits from high-frequency electric discharges; Aspect categorized as a thermodynamically non-equilibrium high temperature plasma; Increase in the concentration of atomic oxygen with power.

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