Relationship between electrical properties and structure in uniaxially oriented polycrystalline silicon films.

MLA

Hasegawa, S., et al. “Relationship between Electrical Properties and Structure in Uniaxially Oriented Polycrystalline Silicon Films.” Journal of Applied Physics, vol. 71, no. 3, Feb. 1992, p. 1462. EBSCOhost, https://doi.org/10.1063/1.351239.

APA

Hasegawa, S., Arai, M., & Kurata, Y. (1992). Relationship between electrical properties and structure in uniaxially oriented polycrystalline silicon films. Journal of Applied Physics, 71(3), 1462. https://doi.org/10.1063/1.351239

Chicago

Hasegawa, S., M. Arai, and Y. Kurata. 1992. “Relationship between Electrical Properties and Structure in Uniaxially Oriented Polycrystalline Silicon Films.” Journal of Applied Physics 71 (3): 1462. doi:10.1063/1.351239.