Cite
Effects of active hydrogen on the stress relaxation of amorphous SiNx:H films.
MLA
Hasegawa, S., et al. “Effects of Active Hydrogen on the Stress Relaxation of Amorphous SiNx:H Films.” Journal of Applied Physics, vol. 75, no. 3, Feb. 1994, p. 1493. EBSCOhost, https://doi.org/10.1063/1.356384.
APA
Hasegawa, S., Amano, Y., Inokuma, T., & Kurata, Y. (1994). Effects of active hydrogen on the stress relaxation of amorphous SiNx:H films. Journal of Applied Physics, 75(3), 1493. https://doi.org/10.1063/1.356384
Chicago
Hasegawa, S., Y. Amano, T. Inokuma, and Y. Kurata. 1994. “Effects of Active Hydrogen on the Stress Relaxation of Amorphous SiNx:H Films.” Journal of Applied Physics 75 (3): 1493. doi:10.1063/1.356384.