Back to Search
Start Over
ALD high-k layer grating couplers for single and double slot on-chip SOI photonics
- Source :
-
Solid-State Electronics . Aug2012, Vol. 74, p58-63. 6p. - Publication Year :
- 2012
-
Abstract
- Abstract: State of the art grating couplers for horizontal single and double slot waveguides are presented; in these devices the input signal is transmitted from a single mode optical fiber to silicon on insulator slot waveguide. In the waveguides, atomic layer deposited (ALD) high- k dielectrics form the low refractive index slot. It is demonstrated that a fully etched design combined with precision of ALD result in highly reproducible devices with theoretical efficiency variations less than 1%. Devices have a peak calculated coupling efficiency of 24% at 1.55μm. In order to achieve an optimal design, optical properties of high- k films are studied by spectroscopic ellipsometry. Measured refractive indices show variations from reference values, originated from film variation in densities. Chips with a test slot material are fabricated and the optical efficiency of the couplers is characterized. The maximum measured coupling efficiency of the couplers is 18.5%. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 00381101
- Volume :
- 74
- Database :
- Academic Search Index
- Journal :
- Solid-State Electronics
- Publication Type :
- Academic Journal
- Accession number :
- 76495340
- Full Text :
- https://doi.org/10.1016/j.sse.2012.04.012