Influence of rf power on the properties of hydrogenated amorphous silicon carbon alloy films prepared by magnetron sputtering of silicon in methane-argon gas mixtures.

Provides information on a study that investigated the radio frequency power dependence of structural, optical, electrical and optoelectronic properties of hydrogenated amorphous silicon carbon alloy films prepared by magnetron sputtering of silicon in methane-argon gas mixtures. Methodology of the study; Results and discussion on the study; Conclusions.