Back to Search
Start Over
Deposition of hard carbon films by rf glow discharge method.
- Source :
-
Journal of Applied Physics . 2/1/1986, Vol. 59 Issue 3, p910. 3p. 1 Black and White Photograph, 1 Diagram, 1 Chart, 4 Graphs. - Publication Year :
- 1986
-
Abstract
- Presents a study that examined hard carbon films produced by rf glow discharge plasma decomposition of hydrocarbon gases diluted with hydrogen gas at relatively low temperature and pressure. Measurement of the optical emission spectra during the deposition of the carbon films; Correlation between the carbon film's properties and the condition of the plasma; Existence of diamond grains in the amorphous phase.
- Subjects :
- *CARBON
*THIN films
*RF values (Chromatography)
*PLASMA gases
*HYDROCARBONS
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 59
- Issue :
- 3
- Database :
- Academic Search Index
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- 7645988
- Full Text :
- https://doi.org/10.1063/1.336562